 
							
| Family | enAF 1MHz | 
|---|---|
| Partnumber | EO-IM-APDA00 | 
| Sample Speed | 500 mm/s | 
| Max. Tracking Error | 1.5 µm | 
| Min.DOF | ±2.3 µm | 
| Magnification | 10.0 x | 
| Focusing Range | 20 mm | 
| PC Interface | Ethernet | 
| Slope Condition | 20µm/50mm | 
| Motion | Dual Motion | 
| Camera type | Line scan | 
| Camera model | Linea HS2 16k 1MHz | 
| Lens model | APO Diamond 10x |