CCSP4000
Lateral Scan만으로 Point의 Z축 정보(높이, 깊이, 두께)를 한번에

Specifications

Measurement Speed 10000 Hz
Measuring Range 4000 μm
Working Distance 16.2 mm
Max. Object Slope ±21 deg
Spot Size 12.3 μm
Vertical Resolution 120 nm
Accuracy 300 nm
Optical Resolution 4.6 μm
Numerical Aperture 0.33