CCSP1400
Lateral Scan만으로 Point의 Z축 정보(높이, 깊이, 두께)를 한번에

Specifications

Measurement Speed 10000 Hz
Measuring Range 1300 μm
Working Distance 12 mm
Max. Object Slope ±25 deg
Spot Size 6.8 μm
Vertical Resolution 50 nm
Accuracy 150 nm
Optical Resolution 2.6 μm
Numerical Aperture 0.41